A Review of SOI Technology and its Applications

Authors

  • Bich-Yen Nguyen
  • George Celler
  • Carlos Mazuré

DOI:

https://doi.org/10.29292/jics.v4i2.297

Keywords:

SOI

Abstract

Classical scaling is no longer possible to follow Moore’s law. In addition to the material innovations such as high K/metal gate and stressors, a transition to SOI is essential to meet scaling and performance
requirements alike. The advances in SOI for fully depleted devices and some key SOI applications are described.

Additional Files

Published

2020-11-21