Thin-Film Lateral SOI PIN Diodes for Thermal Sensing Reaching the Cryogenic Regime

Authors

  • Michelly de Souza
  • Bertrand Rue
  • Denis Flandre
  • Marcelo Antonio Pavanello

DOI:

https://doi.org/10.29292/jics.v5i2.323

Keywords:

PIN diode, Temperature sensor, Low temperature, SOI

Abstract

This paper presents the performance of lateral SOI PIN diodes for temperature sensing in the range of 100 K to 400 K. Experimental results indicate that PIN diodes can be used to implement temperature sensors with high accuracy in cryogenic regime, provided that a suitable temperature range is chosen for calibration. Numerical simulations using Atlas two-dimensional simulator were performed in order to confirm this hypothesis and extend the analysis, verifying the accuracy of the existing model.

Additional Files

Published

2020-11-21