Thin-Film Lateral SOI PIN Diodes for Thermal Sensing Reaching the Cryogenic Regime
DOI:
https://doi.org/10.29292/jics.v5i2.323Keywords:
PIN diode, Temperature sensor, Low temperature, SOIAbstract
This paper presents the performance of lateral SOI PIN diodes for temperature sensing in the range of 100 K to 400 K. Experimental results indicate that PIN diodes can be used to implement temperature sensors with high accuracy in cryogenic regime, provided that a suitable temperature range is chosen for calibration. Numerical simulations using Atlas two-dimensional simulator were performed in order to confirm this hypothesis and extend the analysis, verifying the accuracy of the existing model.
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Published
2020-11-21
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Regular Papers